Members

Award

1.“MHS2006 Best Poster Award”, 2006 International Symposium on Micromechatronics and Human Science (MHS2006)

Research Article

1. B. Tang, M. Shikida, H. Hida, K. Sato, P. Pal, “Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining”, J. Micromech. Microeng. 20 (2010) 065008 (9pp).

2.  K. Shimizu, H. Sasaki, H. Hida, H. Fujita, K. Obinata, M. Shikida and E. Nagamori, “Assembly of skeletal muscle cells on a Si-MEMS device and their generative force measurement”, Biomedical Microdevices, Vol.12, No. 2 (2010), pp. 247-252.

3.  H. Hida, M. Shikida, K. Fukuzawa, S. Murakami, Ke. Sato, K. Asaumi, Y. Iriye and Ka. Sato, “Development of self vibration/detection AFM probe using quartz tuning-fork”, IEEJ Trans. Electrical and Electronic Engineering, Vol.3, No.4 (2009), pp. 378-385.

4.  H. Hida, M. Shikida, K. Fukuzawa, S. Murakami, Ke. Sato, K. Asaumi, Y. Iriye and Ka. Sato, “Fabrication of a Quartz Tuning-Fork Probe with a Sharp Tip for AFM Systems”, Sensors & Actuators: A. Physical, Vol. 148, (2008), pp.311-318.

5.  Prem Pal, K. Sato, M.A. Gosalvez, Y. Kimura, K. Ishibashi, M. Niwano, H. Hida, B. Tang and S. Itoh: Surfactant adsorption on single crystal silicon surfaces in TMAH solution: Orientation-dependent adsorption detected by in-situ infra-red spectroscopy, J. Microelectromechanical Systems, Vol.18, Issue 6, (2009), pp. 1345-1356.